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VDI 2083 Blatt 1.1 Cleanroom technology - Particulate air cleanliness classes for nano-scaled particles (ACnP)

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German title
Reinraumtechnik - Partikelreinheitsklassen der Luft anhand nanopartikulärer Konzentration (ACnP)
Publication date
2021-01
Publisher
Engl. VDI-Gesellschaft Bauen und Gebäudetechnik
Related manuals
Number of pages
12
Available in
German, English
Abstract

This standard describes the measurement and classification of air cleanliness in regard to nanoparticles with dimensions from 5 nm up to < 100 nm regardless of their origin. According to this standard, primarily not a complete clean room is classified with regard to the airborne concentration of nanoscale particles, but local concentration ratios at specifically defined points.

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