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VDI 2083 Blatt 9.1 Cleanroom technology - Compatibility with required cleanliness and surface cleanliness

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German title
Reinraumtechnik - Reinheitstauglichkeit und Oberflächenreinheit
Publication date
Engl. VDI-Gesellschaft Bauen und Gebäudetechnik
Related manuals
Number of pages
Available in
German, English

This standard provides information on planning, creating, maintaining, restoring and proving the cleanliness of equipment and HVAC components. The cleanliness of controlled areas is not an end in itself, but serves to achieve a specified product quality. Requirements, procedures and detection methods therefore depend on the specific use of the cleanroom and the permissible contamination. The content of the standard is a standardised procedure for the qualification of equipment and HVAC components for cleanroom environments.

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