VDI 2083 Blatt 1.1
Cleanroom technology - Particulate air cleanliness classes for nano-scaled particles (ACnP)
At a glance
- Publication date
- 2021-01
- German title
-
Reinraumtechnik - Partikelreinheitsklassen der Luft anhand nanopartikulärer Konzentration (ACnP)
- Number of pages
- 12
- Available in
- German, English
- Related manuals
Abstract
This standard describes the measurement and classification of air cleanliness in regard to nanoparticles with dimensions from 5 nm up to < 100 nm regardless of their origin. According to this standard, primarily not a complete clean room is classified with regard to the airborne concentration of nanoscale particles, but local concentration ratios at specifically defined points.