VDI 2083 Blatt 16.2
Cleanroom technology - Barrier systems - Mini environments
At a glance
- Publication date
- 2021-04
- German title
-
Reinraumtechnik - Barrieresysteme - Minienvironments
- Number of pages
- 30
- Available in
- German, English
- Related manuals
Abstract
This standard applies to all types of mini environments for the separation of defined clean environments in technical areas. This standard applies but to gaseous media such as air and inert gases in a mini environment. It does not apply to vacuum processes or liquid process media. Only airborne contamination is addressed, i.e. the carrier medium is, as a rule, air (or, in special cases, a protective atmosphere, like an inert gas). The growth of contaminants through leaks or weaknesses is not considered.