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VDI 2083 Blatt 16.2 Cleanroom technology - Barrier systems - Mini environments

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German title
Reinraumtechnik - Barrieresysteme - Minienvironments
Publication date
Engl. VDI-Gesellschaft Bauen und Gebäudetechnik
Related manuals
Number of pages
Available in
German, English

This standard applies to all types of mini environments for the separation of defined clean environments in technical areas. This standard applies but to gaseous media such as air and inert gases in a mini environment. It does not apply to vacuum processes or liquid process media. Only airborne contamination is addressed, i.e. the carrier medium is, as a rule, air (or, in special cases, a protective atmosphere, like an inert gas). The growth of contaminants through leaks or weaknesses is not considered.

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