VDI 2083 Blatt 4
-
Withdrawn
Cleanroom technology - Surface cleanliness
At a glance
- Publication date
- 1996-02
- German title
-
Reinraumtechnik - Oberflächenreinheit
- Withdrawal date
- 2007-12
- Replacement document
- Number of pages
- 51
- Available in
- German, English
- Related manuals
Abstract
The document is intended as an aid for the planning, generation, maintenance, restoration and evaluation of the required cleanliness on surfaces in cleanrooms. It includes the classification of the surface cleanliness, the requirements on the cleanliness and suitability of surfaces; the procedures for the cleaning and decontamination of surfaces; the test methods for the evaluation of the surface cleanliness.