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VDI 2083 Blatt 8.1 Cleanroom technology - Air cleanliness chemical concentration (ACC)

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German title
Reinraumtechnik - Luftreinheit anhand chemischer Konzentration (ACC)
Publication date
2014-10
Publisher
Engl. VDI-Gesellschaft Bauen und Gebäudetechnik
Related manuals
Number of pages
56
Available in
German, English
Abstract

This standard deals with the chemical contamination of clean environments. It describes the phenomenon as such, metrology and control of air contamination by gaseous chemicals. This standard has been harmonised with the standard DIN EN ISO 14644-8; the latter, however does not addres the subjects of metrology or control of airborne chemical contamination (formerly termed AMC).

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