VDI 2083 Blatt 8.1
Cleanroom technology - Air cleanliness chemical concentration (ACC)
At a glance
- German title
-
Reinraumtechnik - Luftreinheit anhand chemischer Konzentration (ACC)
- Publication date
- 2014-10
- Publisher
- Engl. VDI-Gesellschaft Bauen und Gebäudetechnik
- Related manuals
- Number of pages
- 56
- Available in
- German, English
- Abstract
-
This standard deals with the chemical contamination of clean environments. It describes the phenomenon as such, metrology and control of air contamination by gaseous chemicals. This standard has been harmonised with the standard DIN EN ISO 14644-8; the latter, however does not addres the subjects of metrology or control of airborne chemical contamination (formerly termed AMC).