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VDI/VDE 2655 Blatt 1.1

Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement

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German title

Optische Messtechnik an Mikrotopografien - Kalibrieren von Interferenzmikroskopen und Tiefeneinstellnormalen für die Rauheitsmessung

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Engl. VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik
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German, English

The standard applies to interference microscopes for measuring the topography of technical surfaces. The described procedures for calibration are comparable to the methods that have already proven themselves in the standards for traceability of stylus instruments. Accordingly, the standards tested there have also been adopted as far as possible. This standard is limited to the basic calibration of interference microscopes. This includes the traceability to the unit of length via the measurement on traceable depth setting standards. The derivation for the measurement uncertainty calculation of the instrument calibration and that of the measurement at depth setting standards results from these measurement processes.

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