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VDI/VDE 2655 Blatt 1.2 Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

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German title
Optische Messtechnik an Mikrotopografien - Kalibrieren von konfokalen Mikroskopen und Tiefeneinstellnormalen für die Rauheitsmessung
Publication date
2010-10
Publisher
Engl. VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik
Related manuals
Number of pages
36
Available in
German, English
Abstract

The guideline describes procedures for the Calibration of confocal microscopes and depth setting standards for roughness measurement and establish thereby the basic for traceability of measuring systems to national standars. First the procedure of determination of the calibration abilities is described. Further basic conditions for the calibration as well as minimum requirements to the calibration procedure are specified. Finally the requirements to the calibration report are specified. A GUM conformal model for the determination of the uncertainty of measurement completes the instructions.

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