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VDI/VDE 2655 Blatt 1.3

Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

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German title

Optische Messtechnik an Mikrotopografien - Kalibrieren von flächenhaft messenden Interferometern und Interferenzmikroskopen für die Formmessung

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Engl. VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik
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German, English

This standard characterises interference microscopes with their measuring technology properties for measuring the surfaces of form elements. This includes the feedback and the calculation of the measurement uncertainty when measuring shape parameters. In addition to the interference microscopes described in VDI 2655 Part 1.1, the methods described here can also be applied to interferometers whose measuring fields can have dimensions of up to approx. Ø 20 mm.

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